Boston, June 30th 2004

We are now shipping IntelliSuite version 7.3 to our customers. This release includes many new features and refinements. The major changes include:

• Expanded piezoelectric capabilities. The use of piezoelectric materials in MEMS has become increasingly common. To address this growing trend, the new PiezoMEMS tools are included free of charge to our existing customers.

• Expanded squeeze film modeling. In 2001, we released the first MEMS specific damping analysis tool. This capability has now been expanded to include electrostatic forces. Now users can model the true dynamic behavior of electromechanically actuated devices moving in a fluid environment

• Macromodel property extraction. Automatic extraction of 6 DOF properties of a device such as moments of inertia, center of mass, and spring constants.

• IntelliMask. The user interface of IntelliMask has been significantly improved based on user feedback. This modification represents a first step in the coming improvements. Users can look forward to many new features as we continue to address the needs of the professional MEMS layout design engineering community.