Sensing/Actuating principles
Electrostatic (Capacitive) (comb drive/parallel plate)
Piezoresistive/resistive
Piezoelectric
Thermal Flow
Optical
Acoustic coupled
Resonance shift
Fluorescence
Tunneling current
Temperature gradient
Sample Applications
Accelerometers
Gyroscopes
Force, Torsion and strain gages
Pressure sensors & Pirani gages
Microphones
Gas chromatography
Spectrometry/Mass spectrometry
Switching (rf, high current)
AFM cantilevers
Micropumps
Recent publications
User contributed publications

Sensors and Actuators

IntelliSense offers a comprehensive solution to customers developing sensors and actuators. We have helped developed precision analytical instrumentation as well as advanced sensing technology for civilian and defence applications. We can take you from concept all the way to market.

- Material databases
- Virtual prototyping
- Solid modeling
- Process modeling
- Automated layout tools for mask generation
- Fully coupled thermo-electro-mechanical modeling tools
- Piezoelectric and piezoresistive modeling
- Biochip and microfluidic modeling
- Chemical sensor modeling
- Package modeling tools
- Cost modeling
- Integrated CMOS design

- Control System Development

- Engineering design services
- Market research services

- Low cost prototyping
- 6 and 8 inch wafer fabrication
- Pilot production capability up to (1000 wafers/month)
- Custom packaging
- CMOS/MEMS integration


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IntelliSuite, Total MEMS Solutions, CAD for MEMS, MEMaterial, AnisE, are registered trademarks of IntelliSense Software Corp. IntelliFAB, IntelliEtch, RECIPE, TEM, EMag, FABViewer, Clean Room, 3DBuilder, SYNPLE, EDA Linker, System Model Extractor, Fastfield Multiphysics, IntelliMask, IntelliMask Pro are trademarks of IntelliSense Software Corp.