FabViewer is a new module in IntelliSense’s Clean Room suite of process simulation and visualization tools. After building up a process flow in IntelliFab, users can visualize the process simulation and final MEMS device in FabViewer. High-resolution JPEGs and movie files...

IntelliEtch is a brand-new atomistic etch simulator with several powerful capabilities. Users can take into account ab initio effects and predict evolving surface morphologies. Wet and dry etching can be performed on high order planes or non-flat substrates. An etched structure...

One major feature in IntelliSuite v8.5 is the capability to simulate advanced fluid-structure interaction. And unlike other tools that can only handle rigid body simulations, IntelliSuite fully supports interactions with deformable, non-rigid bodies. Full coupling with the PiezoMEMS...

In this recent paper in IEEE Electron Device Letters, IntelliSuite is used in the development of a single-crystal-silicon micromechanical resonator.  This bulk-mode resonator was designed to have a Q factor of 1.16 million for high frequency stability at a resonant frequency of 2.18...

Students at UC-Santa Cruz will be designing and fabricating MEMS devices in an upcoming Intro to MEMS Design course taught by Prof. Joel Kubby. The students wil use IntelliSuite to design and model their MEMS devices. Prof. Kubby is currently looking for industry sponsors who will...