IntelliFAB allows you to debug your process flow and your mask set even before you enter the clean room. It allows you to make a virtual prototypes to save costly fabrication mistakes.

Welcome to virtual prototyping

Until now, MEMS designers have typically focused purely on geometric representation of the device in order to analyze device behavior.

The drawback of this methodology is that process induced effects may vary the geometry of the structure significantly. For example, the boron diffusion as an etch stop layer for bulk silicon processing may overstress the structure, strain gradients in poly-silicon structures can distort features, or an anodic bonding process may break down protective oxide films.

IntelliFAB allows designers to takes a different approach. Process flow forms the basis of creating your devices. Our comprehensive process simulation modules incorporate deposition, etching, bonding, doping, electroplating, liftoff, and other process steps common in MEMS design. Other process-induced effects, such as micro-assembly, are also addressed to generate accurate geometric models for the complete range of MEMS devices.

IntelliFAB is directly linked with MEMaterial, a MEMS process database that stores material properties as a function of your machine settings. By developing the fabrication process in conjunction with the analysis model, IntelliSuite enables engineers to perform more accurate device physics analysis and produce manufacturable devices faster.

Take the pain out of meshing

IntelliFAB also features state of the art auto-meshing capabilities to directly mesh solid models created from the process flow. Solid models created by IntelliFAB can be directly exported to analysis engines with the click of a button.

IntelliFAB uses true process information along with your mask layouts to create the device model for analysis.



Foundry ready templates

Processes can be custom-designed one step at a time, or engineers can draw from a wide range of foundry-ready process templates.

Users create their own process flows from a database of over 70 process steps or by including custom process steps. Process flows can be saved as templates for repeated use.

IntelliFAB allows you to quickly build and debug your process traveler down to the last detail.

Process visualization

IntelliFab includes FabViewer, an easy-to-use process visualization tool that allows users to quickly visualize a process flow created in IntelliFab. Users can view their structure at each process step or set the simulation to play on a loop. The ability to view cross sections at any angle or orientation makes it easy to debug the process or perform a failure analysis.

Photo-realistic rendering of MEMS structures makes FabViewer an absolute must-have for engineers creating presentations for a design review or professors making slideshows for a lecture. Seven different resolution settings enable users to adjust the simulation speed and image quality to their liking. Even at the highest resolution, the simulation of highly complex MEMS structures and process flows is completed in minutes. With FabViewer, you can see exactly what your MEMS device looks like – before it’s been created!